Teknologi Monitoring Kualitas Udara Secara Real-Time Terintegrasi
Abstract
Tulisan ini menggambarkan Sensor gas nano oksida logam untuk subsistem pemantauan lingkungan secara real time, sensor gas ini dengan sistem mikroelektromekanis jenis semikonduktor (MEMS) yang mengkonsumsi dengan daya rendah dan sangat responsif dibuat untuk aplikasi pemantauan lingkungan. Subsistem ini dikembangkan dengan menggunakan modul sensor gas, modul Bluetooth, dan telepon personal digital assistant (PDA). Modul sensor gas terdiri dari sensor gas karbon monoksida dan karbon nitrogen dioksida dan chip pemroses sinyal. Sensor gas MEMS terdiri dari pemanas mikro (microheater), elektroda penginderaan, dan material penginderaan. Serbuk nano oksida logam dilapiskan ke substrat menggunakan pemanas mikro dan diintegrasikan ke dalam modul sensor gas. Perubahan resistansi serbuk nano oksida logam dari paparan gas pengoksidasi atau deoksidasi digunakan sebagai mekanisme prinsip operasi sensor gas ini. Variasi yang terdeteksi dalam modul sensor gas ditransfer ke telepon PDA melalui modul Bluetooth. Hasil dari penelitian ini memperlihatkan suatu sistem monitoring kualitas udara untuk memantau paramater gas karbon monoksida dan nitrogen dioksida.
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[2] European Environment Agency, “Air Pollution,” 2001 Report.
[3] J. Moon et al., “Semiconducting ZnO Nanofibers as Gas Sensors and Gas Response Improvement by SnO2 Coating,” ETRI J., vol. 31, no. 6, Dec. 2009, pp. 636-641.
[4] C.S. Moon et al., “Highly Sensitive and Fast Responding CO Sensor Using SnO2 Nanosheets,” Sensors Actuators B, vol. 131, no. 2, 2008, pp. 556-564.
[5] L. Zhao et al., “The Effect of Mutiwalled Carbon Nanotube Doping on the CO Gas Response of SnO2-based Nanomaterials,” Nanotechnol., vol. 18, no. 44, 2007, pp. 1-5.
[6] Widodo, Slamet., “Review Sensor Gas Berbasis Metal Oksida Semikonduktor Untuk Mendeteksi Gas Polutan Yang Selektif dan Sensitif”, Jurnal Techno-Socio Ekonomika, Vol. 12, No. 2, Oktober 2019. ISSN;1979-4835, Hal. 92-112.
[7] Widodo, Slamet., “Proses Pembuatan Divais Sensor Gas CO Berbasis Timah Oksida (SnO2) Dengan Teknologi Film Tebal”, Proseding Seminar Nasional Teknologi Industri Hijau 3, Vol. 2, No. 1, Desember 2020, Hal. 28-41.
[8] J. Kong et al., “Nanotube Molecular Wires as Chemical Sensors,” Sci., vol. 287, no. 5453, 2000, pp. 622-625.
[9] D. Zhang et al., “Detection of NO2 Down to ppb Levels Using Individual and Multiple In2O3 Nanowire Devices,” Nano Lett., vol. 4, no. 10, 2004, pp. 1919-1924.
[10] N. Yamazoe and K. Shimanoe, “Theory of Power Laws for Semiconductor Gas Sensors,” Sensors Actuators B, vol. 128, no. 2, 2008, pp. 566-573.
[11] J.K. Prades et al., “Ultralow Power Consumption Gas Sensors Based on Self-Heated Individual Nanowires,” Appl. Phys. Lett., vol. 93, no. 12, 2008, pp. 123110_1-123110_3.
[12] Q. Wan et al., “Fabrication and Ethanol Sensing Characteristics of ZnO Nanowire Gas Sensors,” Appl. Phys. Lett., vol. 84, no. 18, 2004, pp. 3654-3656.
[13]Widodo, Slamet., “Teknologi Proses Pembuatan Divais Sensor Gas NO2 Dengan Lapisan Aktif In2O3”, Jurnal Alchemy Penelitian Kimia, Vol.10, No.1, Maret 2014, Hal. 69-86.
[14]Widodo, Slamet., Wiranto, G., “Perancangan dan Pembuatan Divais Sensor Gas CO Berbasis Indium Timah Oksida (ITO) Dengan Teknologi Lapisan Tipis”, JKTI, Vol.17, No.1, Juni 2015, Hal. 39-47.
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[16]Widodo, Slamet., “Kajian Perkembangan Teknologi Sensor Gas Untuk Emisi Gas Buang Kendaraan Bermotor”, Jurnal Techno-Socio Ekonomika, Vol. 13, No. 1, April 2020. ISSN;1979-4835, e-ISSN: 2721-2335, Hal. 71-80.
[17] Widodo, Slamet., “Proses Pembuatan Nano Partikel Timah Oksida (SnO2) Dengan Metode Sel Gel Sebagai Bahan Aktif Pada Sensor Gas Polutan”, Proseding Seminar Nasional Teknologi Industri Hijau 3, Vol. 2, No. 1, Desember 2020, Hal. 42-48.
[18] M. Graf et al., “CMOS Microhotplate Sensor System for Operating Temperature up to 500oC,” Sensors Actuator B, vol. 117, no. 2, 2006, pp. 346-352.
[19] C. Hagleitner et al., “Smart Single-Chip Gas Sensor Microsystem,” Nature, vol. 414, 2001, pp. 293-296.
[20] S.Z. Ali et al., “High Temperature SOI CMOS Tungsten Micro-Heaters,” Proc. IEEE Conf. Sensors, 2006, pp. 847-850.
[21]S.E. Moon et al., “Low-Power-Consumption and High-Sensitivity NO2 Micro Gas Sensor Based on a Co-Planar Micro-Heater Fabricated by Using a CMOS-MEMS Process,” J. Korean Phys. Soc., vol. 56, no. 1, 2010, pp. 434-438.
[22] F. Udrea et al., “Three Technologies for a Smart Miniaturized Gas-Sensor: SOI CMOS, Micromachining and CNTs — Challenges and Performance,” Proc. 2007 IEEE Int. Electron Dev. Mtg. Tech. Dig., Washington, DC, Dec. 2007, pp. 831-834.
[23]S.E. Moon et al., “ High-Response and Low-Power-Consumption CO Micro Gas Sensor Based on Nano-powders and a Micro-heater,” J. Korean Phys. Soc., vol. 60, no. 2, 2012, pp. 235-239.
[24]Korean Ministry of Environment, “Air Pollution,” 2010 Report.
[25] N. Barsan, M. Schweizer-Berberich, and W. Gopel, “Fundamental and Practical Aspects in the Design of Nanoscaled SnO2 Gas Sensors: A Status Report,” J. Annal. Chem., vol. 365, 1999, pp. 287-304.
[26]J. Gardner and P.N. Bartlett, “Electronic Nose: Principles and Applications, New York: Oxford University Press, 1999.
[27]N. Barsan and U. Weimar, “Conduction Model of Metal Oxide Gas Sensors,” J. Electroceram., vol. 7, 2001, pp. 143-167.
[28] A. Kolmakov et al., “Detection of CO and O2 Using Tin Oxide NanoWire Sensors,” Adv. Mater., vol. 15, 2003, pp. 997-1000.
[29] Ginanjar, A., Sari, W. P., & Dwipriyoko, E. (2021). Perbandingan Kehandalan Operasi CRUD Menggunakan Perpaduan Spring dan MyBatis Framework serta Algoritma Cache Engine. Jurnal TIARSIE, 18(1), 11-18.
Published
2021-06-30
How to Cite
WIDODO, Slamet.
Teknologi Monitoring Kualitas Udara Secara Real-Time Terintegrasi.
Jurnal Tiarsie, [S.l.], v. 18, n. 2, p. 41-48, june 2021.
ISSN 2623-2391.
Available at: <https://jurnalunla.web.id/tiarsie/index.php/tiarsie/article/view/99>. Date accessed: 20 may 2025.
doi: https://doi.org/10.32816/tiarsie.v18i2.99.
Section
Articles
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